Fabrication and performance evaluation of a metal-based bimorph piezoelectric MEMS generator for vibration energy harvesting
Author(s): |
Chun-Liang Kuo
Shun-Chiu Lin Wen-Jong Wu |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, October 2016, n. 10, v. 25 |
Page(s): | 105016 |
DOI: | 10.1088/0964-1726/25/10/105016 |
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10226466 - Published on:
04/12/2018 - Last updated on:
04/12/2018