Experimental characterization of particle distribution during the process of reducing the air supply volume in an electronic industry cleanroom
Author(s): |
Xiaoliang Shao
Yunfeng Hao Shukui Liang Huan Wang Yu Liu Xianting Li |
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Medium: | journal article |
Language(s): | English |
Published in: | Journal of Building Engineering, January 2022, v. 45 |
Page(s): | 103594 |
DOI: | 10.1016/j.jobe.2021.103594 |
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10637607 - Published on:
30/11/2021 - Last updated on:
30/11/2021