Enhancing the linear dynamic range of a mode-localized MEMS mass sensor with repulsive electrostatic actuation
| Author(s): |
Toky Harrison Rabenimanana
Vincent Walter
Najib Kacem Patrice Le Moal Gilles Bourbon Joseph Lardies |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, 14 May 2021, n. 7, v. 30 |
| Page(s): | 07LT01 |
| DOI: | 10.1088/1361-665x/ac075b |
- About this
data sheet - Reference-ID
10609245 - Published on:
08/06/2021 - Last updated on:
26/08/2021
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