An electrostatic suspension system using piezoelectric actuators
| Author(s): |
T. T. Le
J. U. Jeon S. J. Woo T. Higuchi |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, February 2012, n. 2, v. 21 |
| Page(s): | 025012 |
| DOI: | 10.1088/0964-1726/21/2/025012 |
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10224660 - Published on:
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02/12/2018
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