Electrostatic-hydraulic coupled soft actuator for micropump application

The development of a soft actuator with high displacement is crucial for the effective operation of micropumps, ensuring a high fluid pump rate. This study introduces an innovative approach by presenting the design and fabrication of a novel electrostatic-hydraulic coupled soft actuator for a micropump within a microfluidic system. This pioneering soft actuator, leveraging electrostatic-hydraulic coupling, showcases a unique solution to enhance the performance of micropumps. The versatility of such a soft actuator makes it particularly promising for biomedical applications. The actuator comprises dielectric fluid in an elastomeric shell and electrodes to form the out-of-plane fluid-amplified displacement. This displacement amplification was used to generate a pumping actuation in the micropump. The actuator was characterized in terms of dielectric fluid volume, electrode size, temporal response, and amplification displacement. The soft actuator showed a maximum amplified displacement of 0.51 mm at 10 kV of the applied voltage, but a higher voltage caused a dielectric breakdown. Moreover, the actuator demonstrated the ability to operate at frequencies of 0.25 Hz and 0.1 Hz. The results of the study indicate that the fabricated electrostatic-hydraulic coupled soft actuator is a dependable and effective method of actuation for a micropump in a microfluidic system. The experimental characterization of the micropump revealed a maximum flow rate of 2304 μl min⁻¹.