Effect of the equivalent stiffness of flexible supports on the MEMS cantilever-based sensors
Author(s): |
Zuo-Yang Zhong
Jian-Ping Zhou Hai-Lian Zhang Ting Zhang |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Computers & Structures, June 2016, v. 169 |
Page(s): | 101-111 |
DOI: | 10.1016/j.compstruc.2016.02.004 |
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10284788 - Published on:
05/01/2019 - Last updated on:
05/01/2019