The effect of a SiO2layer on the performance of a ZnO-based SAW device for high sensitivity biosensor applications
Author(s): |
Xi Chen
Dali Liu Jiansheng Chen Guolei Wang |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, November 2009, n. 11, v. 18 |
Page(s): | 115021 |
DOI: | 10.1088/0964-1726/18/11/115021 |
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10224040 - Published on:
04/12/2018 - Last updated on:
04/12/2018