Design and development of micromachined bilateral interdigital coplanar waveguide RF phase shifter compatible with lateral double diffused metal oxide semiconductor voltage controller on silicon
Author(s): |
Hargsoon Yoon
K. J. Vinoy Vijay K. Varadan |
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Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, October 2003, n. 5, v. 12 |
Page(s): | 769-775 |
DOI: | 10.1088/0964-1726/12/5/014 |
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10216160 - Published on:
04/12/2018 - Last updated on:
04/12/2018