Design and development of a MEMS-IDT gyroscope
Author(s): |
V. K. Varadan
W. D. Suh P. B. Xavier K. A. Jose V. V. Varadan |
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Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, December 2000, n. 6, v. 9 |
Page(s): | 898-905 |
DOI: | 10.1088/0964-1726/9/6/322 |
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10215341 - Published on:
04/12/2018 - Last updated on:
04/12/2018