Design and analysis of a Piezo-actuated flexure-based scanning system in ECDLs
Author(s): |
Meng Zhang
Zhigang Liu Yu Zhu Xin Zhang |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, 29 August 2019, n. 10, v. 28 |
Page(s): | 105017 |
DOI: | 10.1088/1361-665x/ab3542 |
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10327609 - Published on:
29/07/2019 - Last updated on:
14/11/2019