Deposition and characterization of Pb(Zr,Ti)O3 sol–gel thin films for piezoelectric cantilever beams
| Author(s): |
Mengwei Liu
Jing Wang Liding Wang Tianhong Cui |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, February 2007, n. 1, v. 16 |
| Page(s): | 93-99 |
| DOI: | 10.1088/0964-1726/16/1/011 |
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10223360 - Published on:
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04/12/2018
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