Deformation analysis of a film-overlapped micro-pump membrane structure
| Author(s): |
Fu-Shin Lee
Pi-Wen Wang Chih-Hsiung Chen |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, April 2008, n. 2, v. 17 |
| Page(s): | 025022 |
| DOI: | 10.1088/0964-1726/17/2/025022 |
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04/12/2018
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