Control system design for nano-positioning using piezoelectric actuators
| Author(s): |
Jinjun Shan
Yanfang Liu Ulrich Gabbert Naigang Cui |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, February 2016, n. 2, v. 25 |
| Page(s): | 025024 |
| DOI: | 10.1088/0964-1726/25/2/025024 |
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10226144 - Published on:
04/12/2018 - Last updated on:
04/12/2018
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