Analysis of the piezoresistive properties of isotropic polysilicon based on a self-consistent micromechanics model
Author(s): |
Naoki Matsuzuka
Toshiyuki Toriyama |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, June 2011, n. 8, v. 20 |
Page(s): | 085018 |
DOI: | 10.1088/0964-1726/20/8/085018 |
- About this
data sheet - Reference-ID
10224507 - Published on:
02/12/2018 - Last updated on:
02/12/2018