Analysis of a nanopositioning actuator using numerical and analytic methods
Author(s): |
Jong Seok Rho
Chang Hwan Lee Tae-Kyung Chung Chang-Hwan Im Hyun Kyo Jung |
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Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, April 2008, n. 2, v. 17 |
Page(s): | 025025 |
DOI: | 10.1088/0964-1726/17/2/025025 |
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10223700 - Published on:
04/12/2018 - Last updated on:
04/12/2018