Young s modulus measurements of silicon nanostructures using a scanning probe system: a non-destructive evaluation approach
| Author(s): |
Kumar R. Virwani
A. P. Malshe W. F. Schmidt D. K. Sood |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, December 2003, n. 6, v. 12 |
| Page(s): | 1028-1032 |
| DOI: | 10.1088/0964-1726/12/6/023 |
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10216220 - Published on:
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04/12/2018
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