Atomic layer deposition of TiO2 and Al2O3 thin films and nanolaminates
| Author(s): |
D. R. G. Mitchell
G. Triani D. J. Attard K. S. Finnie P. J. Evans C. J. Barbé J. R. Bartlett |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, February 2006, n. 1, v. 15 |
| Page(s): | S57-S64 |
| DOI: | 10.1088/0964-1726/15/1/010 |
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04/12/2018
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