Modeling the Influence of Surface Effect on Instability of Nano-cantilever in Presence of Van Der Waals Force

Surface effect often plays a significant role in the pull-in performance of nano-electromechanical systems (NEMS) but limited works have been conducted for taking this effect into account. Herein, the influence of surface effect has been investigated on instability behavior of cantilever nano-actuator in the presence of van der Waals force (vdW). Three different methods, i.e. an analytical modified Adomian decomposition (MAD), Lumped parameter model (LPM) and numerical solution have been applied to solve the governing equation of the system. The results demonstrate that surface effect reduces the pull-in voltage of the system. Moreover, surface energy causes the cantilever nano-actuator with the assigned parameter to deflect as a softer structure. It is found that while surface effect becomes important for low values of the cantilever nano-actuator thickness, vdW attraction is significant for low initial gap values. Surprisingly, the increase in the initial gap, enhances the contribution of surface effect in pull-in instability of the system while reduces the contribution of vdW attraction. Furthermore, the minimum initial gap and the detachment length of the cantilever nano-actuator that does not stick to the substrate due to vdW force and surface effect has been approximated. A good agreement has been observed between the values of instability parameters predicted via these three methods. Whilst compared to the instability voltage predicted by numerical solution, the pull-in voltage obtained by MAD series and LPM method is overestimated and underestimated, respectively.