Lateral-flexural and Torsional Vibrations of Flexible Ring for Electromechanical Integrated Electrostatic Harmonic Actuator

This paper presents an electromechanical coupled dynamic equation for the lateral-flexural and torsional vibrations of a flexible ring for an electromechanical integrated electrostatic harmonic actuator as well as the equation of the forced response of the electromechanical integrated electrostatic harmonic actuator to voltage excitation. By solving these equations, the natural frequency and vibration modes of the flexible ring for the actuator are investigated. Changes in the natural frequency with respect to the main system parameters are also examined and the dynamic responses of the actuator to voltage excitation obtained.