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Size-Dependent Dynamic Behavior of Electrostatically Actuated Microaccelerometers Under Mechanical Shock

Autor(en):

Medium: Fachartikel
Sprache(n): Englisch
Veröffentlicht in: International Journal of Structural Stability and Dynamics, , n. 4, v. 17
Seite(n): 1750042
DOI: 10.1142/s0219455417500420
Abstrakt:

This paper studies the size-dependent dynamic behavior of electrostatically actuated microaccelerometers using the modified couple stress theory. The device is modeled as a cantilevered microbeam with an electrostatically actuated proof mass attached to its free end. The equation of motion is derived based on the Hamilton’s principle and solved both numerically (using the finite element and finite difference methods) and analytically (using the perturbation technique) and the dynamic response and pull-in instability of the device is studied. The results of these methods are compared and the source of error in the analytical results at high values of external acceleration is discussed. Furthermore, the results are compared with those evaluated based on the classical theory. It is found that for cantilevered accelerometers with a beam thickness of the order of the material length scale parameter, the classical theory gives a rough estimation of the dynamic response of the system. In this situation, the error of using the classical theory may change the prediction of the system behavior from unstable to stable.

Structurae kann Ihnen derzeit diese Veröffentlichung nicht im Volltext zur Verfügung stellen. Der Volltext ist beim Verlag erhältlich über die DOI: 10.1142/s0219455417500420.
  • Über diese
    Datenseite
  • Reference-ID
    10352392
  • Veröffentlicht am:
    14.08.2019
  • Geändert am:
    14.08.2019
 
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