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Implementation of cross-scale plane micro-scratching process driven by hybrid piezoelectric actuation

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Medium: Fachartikel
Sprache(n): Englisch
Veröffentlicht in: Smart Materials and Structures, , n. 9, v. 32
Seite(n): 095007
DOI: 10.1088/1361-665x/ace814
Abstrakt:

The atomic force microscope tip-based mechanical machining technique has been used to fabricate complex micro-structures successfully. However, the machining scope and depth are limited, which holds back this technique severely. This work presents the design and evaluation of a piezoelectric manufacturing system (PMS) for implementation of cross-scale (large scale and high resolution) plane micro-scratching. The PMS has the two-dimensional (2D) micro-machining ability with depths up to 0.98 μm in the millimeter machining scope through the combination of a travel range XY positioning stage and a three-degree-of-freedom (3-DOF) sandwich piezoelectric manipulator. The tracing property of the PMS is feasible for large scale machining by controlling the multi-axis cooperative motion of the 2-DOF stage. The experiments show that the micro-triangles and micro-circles arrays with dimensions from 40 μm to 400 μm are machined successfully. The deviations of the position determination and machined depths for all the micro-structures are less than 5%. Further, it is verified that the manipulator has potential to be used in vibration-assisted cutting to improve machining quality. To sum up, the PMS shows great prospects in the applications of machining cross-scale and large depth planar micro-structures.

Structurae kann Ihnen derzeit diese Veröffentlichung nicht im Volltext zur Verfügung stellen. Der Volltext ist beim Verlag erhältlich über die DOI: 10.1088/1361-665x/ace814.
  • Über diese
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  • Reference-ID
    10734175
  • Veröffentlicht am:
    03.09.2023
  • Geändert am:
    03.09.2023
 
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